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Reactive-ion etching
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#	Item
71	Microsoft Word - vh_man_2400_en_05112903_ls.doc Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:47 Technology Photoresist Polymers Spin coating Resist Deep reactive-ion etching Ultraviolet Etching Photolithography Semiconductor device fabrication Materials science Microtechnology
72	Deep Si Etching at the UCSB Nanofabrication Facility Silicon Deep RIE/ICP – Bosch Si- DRIE Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:49 Technology Etching Deep reactive-ion etching Microelectromechanical systems Glass etching Sulfur hexafluoride 9W Microtechnology Materials science Semiconductor device fabrication
73	GaInAs/AlInAs/InP RIE Etching at the UCSB Nanofabrication Facility Methane/Hydrogen/Argon – Parallel Plate RIE #2 Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:49 Microtechnology Etching Indium gallium arsenide Deep reactive-ion etching Semiconductor device fabrication Chemistry Materials science
74	Microsoft Word - Paper 3DOF Nanopositioner_D16b_2ndReview05 Add to Reading List Source URL: www.nist.gov Language: English - Date: 2014-06-10 11:58:56 Mechanics Elasticity Actuators Mechanical engineering Microelectromechanical systems Deep reactive-ion etching Buckling XYZ Bending Materials science Microtechnology Physics
75	All Active Equipment Sep 4, 2014 5:10 AM Name 4ptprb 4ptprb2 accounting afm2 Add to Reading List Source URL: nanolab.berkeley.edu Language: English - Date: 2014-09-05 08:10:25 Technology Materials science Microelectromechanical systems Lam Research Sputtering Reactive-ion etching Chemical vapor deposition Plasma etcher Tetramethylammonium hydroxide Semiconductor device fabrication Plasma processing Chemistry
76	Fabrication of wide-IF 200– 300 GHz superconductor–insulator–superconductor mixers with suspended metal beam leads formed on silicon-on-insulator Anupama B. Kaul,a) Bruce Bumble, Karen A. Lee, and Henry G. LeDuc Je Add to Reading List Source URL: www.submm.caltech.edu Language: English - Date: 2005-05-17 12:39:26 Technology Etching Deep reactive-ion etching Silicon on insulator Wafer Stepper Integrated circuit Beam lead technology Resist Semiconductor device fabrication Materials science Microtechnology
77	Microsoft Word - Luttge-06HQGR0175.doc Add to Reading List Source URL: minerals.usgs.gov Language: English - Date: 2008-02-21 12:19:06 Semiconductor device fabrication Etching Deep reactive-ion etching Etch pit density Dissolution Weathering Surface area Pyrite Soil Chemistry Materials science Microtechnology
78	DRIE Membership Brochure_V3.qxd Add to Reading List Source URL: www.drieiwest.org Language: English - Date: 2014-04-08 05:35:59 Disaster preparedness Humanitarian aid Data management Disaster recovery Information Risk Management Business continuity Crisis management Deep reactive-ion etching Preparedness Management Public safety Emergency management
79	DRIE Membership Brochure_V3.qxd Add to Reading List Source URL: www.driewest.org Language: English - Date: 2011-08-14 22:38:10 Disaster preparedness Humanitarian aid Data management Disaster recovery Information Risk Management Business continuity Crisis management Deep reactive-ion etching Preparedness Management Public safety Emergency management
80	DRIE Membership Brochure_V3.qxd Add to Reading List Source URL: www.drieottawa.org Language: English - Date: 2008-09-16 12:09:35 Disaster preparedness Humanitarian aid Data management Disaster recovery Information Risk Management Business continuity Crisis management Deep reactive-ion etching Preparedness Management Public safety Emergency management

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